This patented, single element transducer combines advanced micromachining techniques, thin—film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Ideally suited for Microprocessor or Microcontroller—Based Systems? Durable Epoxy Unibody Element? Do not connect to external circuitry or ground. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
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This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.
Freescale Semiconductor, Inc. All rights reserved. Decoupling circuit shown in Figure 4 required to meet electrical specifications. Device is ratiometric within this specified excitation range.
Offset Voff is defined as the output voltage at the minimum rated pressure. Full Scale Span VFSS is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. Accuracy error budget consists of the following: Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. Exposure beyond the specified limits may cause permanent damage or degradation to the device. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. Media, other than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application.
Figure 2 shows the sensor output signal relative to pressure input. The output will saturate outside of the specified pressure range.
Proper decoupling of the power supply is recommended. Output vs. Factor x 0. The Pressure P1 side is the side containing fluorosilicone gel which protects the die from harsh media. NOM 30? NOM 0.
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